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Sentaurus Process is an advanced 1D, 2D and 3D process simulator for developing and optimizing silicon semiconductor process technologies. It is a new-generation process simulator for addressing the challenges found in current and future process technologies. Equipped with a set of advanced process models, which include default parameters calibrated with data from equipment vendors, Sentaurus Process provides a predictive framework for simulating a broad range of technologies from nanoscale CMOS to large-scale high-voltage power devices. Sentaurus Process is part of a comprehensive suite of core TCAD products for multi-dimensional process, device, and system simulations, embedded into a powerful user interface.